Design and Characterization of a High Vacuum Metals Deposition System based on Electron Beam Evaporation

dc.creator	Ramírez Porras, Arturo
dc.creator	Avendaño Soto, Esteban Damián
dc.creator	Araya Pochet, José
dc.date.accessioned	2010-08-03T02:17:01Z
dc.date.available	2010-08-03T02:17:01Z
dc.date.issued	2010-08-03T02:17:01Z
dc.identifier.uri	https://hdl.handle.net/10669/328
dc.description.abstract	We describe a high vacuum metals deposition system based ona variation of a pendant-drop type electron beam evaporator.This system uses a Molybdenum crucible as an evaporantinstead of a rod or wire usually used in ultrathin filmsgrowing systems. The advantage of this setup is that it canevaporate different metals with a power delivered to thecrucible of around 100 W in optimum operation mode. X-Raysfluorescence test performed on the so-obtained thin films showno crucible material contamination traces, a very importantpoint in surface science technology.	en
dc.description.sponsorship	Vicerrectoría de Investigación (UCR).	es_ES
dc.language.iso	en_US	es_ES
dc.subject	Sistema de alto vacío	es_ES
dc.subject	Depositación de materiales por evaporación	es_ES
dc.title	Design and Characterization of a High Vacuum Metals Deposition System based on Electron Beam Evaporation	en
dc.type	presentación de congreso
dc.description.procedence	UCR::Vicerrectoría de Investigación::Unidades de Investigación::Ciencias Básicas::Centro de Investigación en Ciencia e Ingeniería de Materiales (CICIMA)	es_ES